Overview
RMS-1000P High-Temp Four-Point Probe Resistivity Measurement System is designed for semiconductor thin films and wafer characterization. As an experienced semiconductor test equipment factory, we provide precise sheet resistance and resistivity measurement using dual electrostatic method. The system handles silicon, germanium, GaAs, and ITO films with specialized spring-loaded probe fixture, supporting RT-1000°C testing in vacuum or controlled atmospheres for R&D laboratories and wafer manufacturers.
Specifications
| Parameter | Value |
| Measurement Principle | In-line four-probe method; dual electrical-measurement combination |
| Main Measurement | Resistivity & sheet resistance |
| Range | 0.1 mΩ–100 MΩ |
| Max Furnace Temperature | Up to 1100°C |
| Atmosphere | Inert/oxidizing/reducing; vacuum; flowing atmosphere |
| Notable Features | One-touch lift; thin-film-friendly probe; professional thin-film software |
| Temperature Range | RT-600°C / 1000°C |
| Temperature Control Accuracy | ±0.5°C |
| Temperature Control Method | PID precision control |
| Heating Rate | 0-10°C/min (typical 3°C/min) |
| Resistance Range | 0.1mΩ ~ 100MΩ |
| Resistivity Range | 1mΩ.cm ~ 10MΩ.cm |
| Sheet Resistance Range | 0.1mΩ ~ 100MΩ |
| Sample Specification | Thin film 15-30mm, d<4mm |
| Measurement Method | Four-point probe dual electrostatic |
| Electrode Material | Tungsten carbide / Platinum probes |
| Needle Insulation Resistance | ≥1000MΩ |
| Insulation Material | 99% alumina ceramic |
| Display | 10.1" color touchscreen |
| Data Interface | USB |
| Communication Interface | LAN port |
| Data Storage | TXT format |
| Dimensions (L×H×W) | 630×640×450mm |
| Weight | 42.5kg |
| Power Supply | 220V±10%, 50Hz, 2.6kW |
| Standards | ASTM F84, GB/T1551-2009, GB/T1551-1995 |
Applications
- RMS-1000P is specialized for semiconductor thin film characterization including silicon wafers, germanium substrates, GaAs, InSb, GaAsAl, GaAsP, solid solution semiconductors, and ITO conductive glass. Critical for solar cell manufacturing, LED production, integrated circuit development, and transparent conductive film research.
More Details
Four-Probe Advantage
Classic in-line probe design helps avoid damage to thin-film samples.
Atmosphere Options
Supports inert/oxidizing/reducing atmospheres, vacuum, and flowing gas for temperature-dependent measurements.